Published January 2002
| Published
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A thermopneumatic microfluidic system
- Creators
- Grosjean, Charles
- Yang, Xing
-
Tai, Yu-Chong
Chicago
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Abstract
A self-contained planar microfluidic system using thermopneumatic actuation has been demonstrated. Using a novel suspended silicon island heater fabricated by deep reactive ion etching (DRIE), and a precision machined acrylic fluidic substrate with a matching silicone rubber membrane, a self-contained system of channels, valves, and a pump has been demonstrated using air as a working fluid.
Additional Information
© 2002 IEEE. This work is supported by DARPA/MTO MicroFlumes Program under Naval Ocean Systems Center Contract N66001-96-8632 and the NSF Center for Neuromorphic System Engineering at Caltech.Attached Files
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Additional details
- Eprint ID
- 77641
- Resolver ID
- CaltechAUTHORS:20170522-165050873
- Defense Advanced Research Projects Agency (DARPA)
- N66001-96-8632
- NSF
- Center for Neuromorphic Systems Engineering, Caltech
- Created
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2017-05-23Created from EPrint's datestamp field
- Updated
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2021-11-15Created from EPrint's last_modified field