Integrated surface-micromachined mass flow controller
- Creators
- Xie, Jun
- Shih, Jason
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Tai, Yu-Chong
Abstract
An integrated surface-micromachined mass flow controller (MFC) that consists of an electrostatically actuated microvalve and a thermal flow sensor is presented here. With a unique design and utilizing a multilayer Parylene process, the active microvalve and the flow sensor are integrated onto a single chip to perform closed-loop flow control. Sensitivity of the flow sensor is 55 μV/(μ/L/min) for airflow and 12.2 μV/(nL/min) for water. The valve is actuated with a 10 kHz AC signal and an applied pressure of 21 kPa can be sealed with an actuation voltage of 200 V_peak (±200 V). For flow control, both Pulse Width Modulation (PWM) and actuation voltage adjustment are demonstrated. PWM shows better performance in terms of controllability and linearity.
Additional Information
© 2003 IEEE. This work is supported in part by NSF ERC Center at Caltech (Grant No. EEC-9402726) and DARPA/MTO Bioflips Program. The authors would like to thank Mr. Trevor Roper for the assistance with fabrication and Dr. Yong Xu for the helpful discussion.Attached Files
Published - 01189677.pdf
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Additional details
- Eprint ID
- 77581
- Resolver ID
- CaltechAUTHORS:20170518-125539929
- NSF
- EEC-9402726
- Defense Advanced Research Projects Agency (DARPA)
- Created
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2017-05-18Created from EPrint's datestamp field
- Updated
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2021-11-15Created from EPrint's last_modified field