Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published June 2007 | Published
Book Section - Chapter Open

Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators

Abstract

We report measurements on quality factors (Q's) of single-crystal silicon nanowire (SiNW) resonators operating in the very-high frequency (VHF) range. Q's of ~200 MHz metalized SiNWs are considerably lower than those of the pristine SiNWs operating at similar frequencies. The observed damping effect due to resonance transduction agrees well with the loaded-Q model for magnetomotive scheme. The temperature dependency of dissipation (Q^(-1)) is found to be approximately from Q^(-1) ∝ T^(0.3) to Q^(-1) ∝ T^(0.4). Clamping losses are becoming important for such VHF ultrasmall resonators.

Additional Information

© 2007 IEEE.

Attached Files

Published - 04300384.pdf

Files

04300384.pdf
Files (1.1 MB)
Name Size Download all
md5:685d83c00be7f740064261af1a64f642
1.1 MB Preview Download

Additional details

Created:
August 19, 2023
Modified:
October 25, 2023