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Published May 2007 | Published
Book Section - Chapter Open

Electron-Beam Lithography Techniques for Micro- and Nano-Scale Surface Structure Current Injection Lasers

Abstract

We demonstrate nanoscale patterning and overlay of two-dimensional gratings and waveguides with accuracy better than 45nm using electron-beam lithography for surface structure lasers with large areas.

Additional Information

© 2007 OSA.

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