Parylene-C as a piezoelectric material

Abstract

This work reports the first study of preparing Parylene-C (i.e., PA-C) as a piezoelectric material. The poling of the Parylene-C film was performed with an electric field up to 40 MV/m up to 250°C. This work also applied a charge integration method to measure the longitudinal piezoelectric coefficient (i.e., d33) using step-wise pneumatic pressure changes over the piezoelectric PA-C film samples in a sealed chamber. The (d33) is measured to be -0.01 to -2.00pC/N depending on poling conditions.

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