Published May 1, 1997
| Published
Journal Article
Open
Micromachined electromagnetic scanning mirrors
- Creators
- Miller, Raanan A.
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Tai, Yu-Chong
Chicago
An error occurred while generating the citation.
Abstract
We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved.
Additional Information
© 1997 Society of Photo-Optical Instrumentation Engineers. Received Nov. 8, 1996; Revised Jan. 14, 1997; Accepted Jan. 24, 1997. This project was partially supported by AFOSR and DARPA under AFOSR Grant No. F49620-94-1-0008. The authors would like to thank Geoffrey Burr, Gregory Billock, and Dr. Demetri Psaltis for using the MEMS mirrors in their holographic storage systems. Without their help this work would not be possible. We also thank Gordon Hughes of Seagate technology, and Stanley Bacon for their assistance with magnetic measurements.Attached Files
Published - 1399_1.pdf
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Additional details
- Eprint ID
- 70926
- Resolver ID
- CaltechAUTHORS:20161006-135453747
- Air Force Office of Scientific Research (AFOSR)
- F49620-94-1-0008
- Defense Advanced Research Projects Agency (DARPA)
- Created
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2016-10-12Created from EPrint's datestamp field
- Updated
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2023-10-23Created from EPrint's last_modified field