Advanced Conformal Parylene Fabrication for Micro/nano Devices

Abstract

Herein, we reported several advanced parylene fabrication techniques for various micro/nano devices by taking advantages of the conformal deposition capability and overcoming related restrictions when depositing in high aspect ratio structures, including deep-trench filling by Parylene C for thermal isolation in silicon microdevices, parylene molding technique for high porosity filter membrane preparation, Parylene C caulked PDMS (pcPDMS) for low permeability microfluidics applications, and ultra-thin parylene deposition for flexible electronics.

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