Published June 2015
| public
Book Section - Chapter
Study of Parylene penetration into microchannel
- Creators
- Wang, W.
- Kang, D.
-
Tai, Y. C.
Chicago
An error occurred while generating the citation.
Abstract
This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass, substrate temperature and channel size on the penetration length, i.e., the length that Parylene can be deposited into the microchannel from the inlet. Understanding the mechanism of Parylene penetration into microchannel helps to develop mass-producible inner surface protection design and process for microfluidic devices.
Additional Information
© 2015 IEEE. The authors thank all the micromachining group members in Caltech. WW thanks the financial support from the scholarship from the China Scholarship Council and the Major State Basic Research Development Program (973 Program) (Grant Nos. 2011CB309502 and 2015CB352100), the National Natural Science Foundation of China (Grant Nos. 81471750 and 91323304), the 985-III program (clinical applications), and the Seeding Grant for Medicine and Information Sciences (2014-MI-04) of Peking University.Additional details
- Eprint ID
- 69957
- DOI
- 10.1109/TRANSDUCERS.2015.7181171
- Resolver ID
- CaltechAUTHORS:20160826-092127903
- China Scholarship Council
- Major State Basic Research Development Program
- 2011CB309502
- Major State Basic Research Development Program
- 2015CB352100
- National Natural Science Foundation of China
- 81471750
- National Natural Science Foundation of China
- 91323304
- Peking University
- Created
-
2016-08-26Created from EPrint's datestamp field
- Updated
-
2021-11-11Created from EPrint's last_modified field