Published May 30, 2016
| Submitted
Journal Article
Open
Design of tunable GHz-frequency optomechanical crystal resonators
Chicago
Abstract
We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V^2 with an on-chip capacitor that was optimized to exert forces up to 1 µN at 10 V operation voltage. Optical resonance frequencies around 190 THz with Q-factors up to 2.2 × 10^6 place the structure in the well-resolved sideband regime with vacuum optomechanical coupling rates up to g_0/2π = 353 kHz. Tuning can be used, for instance, to overcome variation in the device-to-device acoustic resonance frequency due to fabrication errors, paving the way for optomechanical circuits consisting of arrays of optomechanical cavities.
Additional Information
© 2016 OSA. Received 21 Mar 2016; revised 4 May 2016; accepted 9 May 2016; published 17 May 2016. The authors would like to thank Matthew H. Matheny for valuable discussions on the benefits of dimerization of acoustic modes in phononic crystals. This work was supported by the AFOSR Hybrid Nanophotonics MURI, the Alexander von Humboldt Foundation, the Max Planck Society, and the Kavli Nanoscience Institute at Caltech.Attached Files
Submitted - 1603.05721.pdf
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Additional details
- Eprint ID
- 65955
- Resolver ID
- CaltechAUTHORS:20160406-085327170
- Air Force Office of Scientific Research (AFOSR)
- Alexander von Humboldt Foundation
- Max Planck Society
- Kavli Nanoscience Institute
- Created
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2016-04-06Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field
- Caltech groups
- Institute for Quantum Information and Matter, Kavli Nanoscience Institute