Published September 25, 2012
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UV photon-counting CCD detectors that enable the next generation of UV spectroscopy missions: AR coatings that can achieve 80-90% QE
Abstract
We describe recent progress in the development of anti-reflection coatings for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of coatings which are able to achieve greater than 50% QE in 4 bands from 130nm to greater than 300nm. We now present new refinements of these AR-coatings which will improve performance in a narrower bandpass by 50% over previous work. Successful test films have been made to optimize transmission at 190nm, reaching 80% potential transmission.
Additional Information
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors wish to thank Mike Lee of JPL for his assistance with ALD processes. The research was carried out in part at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with NASA. This work was partially supported by KISS, the W. M. Keck Institute for Space Studies, and by NASA Headquarters under the NASA Earth and Space Science Fellowship Program, NASA Grant NX11AO07H, and NASA Grant NNX12AF29G.Attached Files
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Additional details
- Eprint ID
- 64610
- Resolver ID
- CaltechAUTHORS:20160219-142226920
- NASA Earth and Space Science Fellowship
- Keck Institute for Space Studies (KISS)
- NNX11AO07H
- NASA
- NNX12AF29G
- NASA
- NASA/JPL/Caltech
- Created
-
2016-02-22Created from EPrint's datestamp field
- Updated
-
2021-11-10Created from EPrint's last_modified field
- Caltech groups
- Keck Institute for Space Studies, Space Astrophysics Laboratory
- Series Name
- Proceedings of SPIE
- Series Volume or Issue Number
- 8453