Quantum Electromechanics on Silicon Nitride Nanomembranes
Abstract
Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom—mechanical, optical and microwave—would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments.
Additional Information
© 2016 The Author(s). This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ Received: 22 January 2016; Accepted: 28 June 2016; Published online: 03 August 2016. We thank Joe Redford, Lev Krayzman, Matt Shaw and Matt Matheny for help in the early parts of this work. L.H. thanks Andreas Wallraff for his support during his Master's thesis stay at Caltech. This work was supported by the DARPA MESO programme, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. A.P. was supported by a Marie Curie International Outgoing Fellowship within the 7th European Community Framework Programme, NEMO (GA 298861). Certain commercial equipment and software are identified in this documentation to describe the subject adequately. Such identification does not imply recommendation or endorsement by the NIST, nor does it imply that the equipment identified is necessarily the best available for the purpose. Data availability: The authors declare that the data supporting the findings of this study are available within the article and its Supplementary Information files. Author contributions: O.P., J.M.F., M.K., A.P., R.N. and K.S. planned the experiment. J.M.F., M.K., A.P., R.N. and M.D. performed the device design and fabrication. J.M.F., A.P., L.H. and M.K. installed the experimental setup. M.D. and K.S. provided the substrates. J.M.F., M.K. and O.P. performed the measurements, analysed the data and wrote the manuscript. The authors declare no competing financial interests.Attached Files
Published - ncomms12396.pdf
Submitted - 1512.04660v2.pdf
Supplemental Material - ncomms12396-s1.pdf
Supplemental Material - ncomms12396-s2.pdf
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Additional details
- PMCID
- PMC4976205
- Eprint ID
- 64174
- Resolver ID
- CaltechAUTHORS:20160202-153240802
- Defense Advanced Research Projects Agency (DARPA)
- Institute for Quantum Information and Matter (IQIM)
- NSF Physics Frontiers Center
- Gordon and Betty Moore Foundation
- Kavli Nanoscience Institute
- GA 298861
- Marie Curie Fellowship
- Created
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2016-02-02Created from EPrint's datestamp field
- Updated
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2022-04-25Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute, Institute for Quantum Information and Matter