Published October 17, 1975
| public
Journal Article
Thin Films and Solid-Phase Reactions
- Creators
- Mayer, James W.
- Poate, John M.
- Tu, King-Ning
Chicago
An error occurred while generating the citation.
Abstract
Thin films play a dominant role in modern technology. They appear as vital elements in integrated circuits as well as superconducting elements and solar energy conversion structures. Thin films are used both as active structures of precisely controlled thickness and area, and passive structures for connection to, or isolation from, the outside world.
Additional Information
© 1975 American Association for the Advancement of Science. We acknowledge the contributions of our colleagues at Bell Laboratories, IBM-Watson Research Center, and Caltech to many of the concepts presented here. The Caltech work was supported by grants from the Ford Motor Foundation and the Office of Naval Research (L. Cooper). The IBM work was supported in part by ARPA contract F19628-74-C-0077.Additional details
- Eprint ID
- 62004
- Resolver ID
- CaltechAUTHORS:20151109-144638835
- Ford Motor Foundation
- Office of Naval Research (ONR)
- Advanced Research Projects Agency (ARPA)
- F19628-74-C-0077
- Created
-
2015-11-09Created from EPrint's datestamp field
- Updated
-
2021-11-10Created from EPrint's last_modified field