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Published February 11, 2010 | Submitted + Published
Patent Open

Optical switch using frequency-based addressing in a microelectromechanical systems array

Abstract

Embodiments of the present invention provide structures for microelectromechanical systems (MEMS) that can be sensed, activated, controlled or otherwise addressed or made to respond by the application of forcing functions. In particular, an optical shutter structure suitable for use in an optical switch arrangement is disclosed. In one embodiment, an optical shutter or switch can be scaled and/or arranged to form arbitrary switch, multiplexer and/or demultiplexer configurations. In another embodiment of the present invention, an optical switch can include: a shutter; and a flexure coupled to the shutter, whereupon a vibration transmitted to the flexure when in the presence of a resonant frequency causes the shutter to move across an opening for the passage of an optical signal.

Additional Information

Publication number US7656568 B2. Publication type Grant. Application number US 11/436,231. Publication date Feb 2, 2010. Application publication date Nov. 23, 2006. Filing date May 17, 2006. Priority date May 18, 2005. Government interests: This invention was made with Government support under NSF Grant Nos. EIA-0122599 and EEC-0318642. The Government has certain rights to this invention. Parent case: This application claims the benefit of priority from U.S. provisional patent application No. 60/793,424, filed Apr. 19, 2006, the entirety of which is incorporated herein by reference. Parent Case Text: This application claims priority from Provisional U.S. Patent Application 60/682,770 "FREQUENCY-BASED ADDRESSING OF COMPONENTS IN A MICRO-ELECTROMECHANICAL SYSTEMS ARRAY", filed May 18, 2005 and U.S. Pat. No. 7,355,793 entitled "OPTICAL SYSTEM APPLICATION TO IMPROVING THE DYNAMIC RANGE OF SHACK-HARTMANN SENSORS" issued Apr. 8, 2008. These applications are incorporated herein by reference for all purposes.

Attached Files

Published - US7656568.pdf

Submitted - US20060262379.pdf

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Additional details

Created:
August 19, 2023
Modified:
October 20, 2023