Electron transport properties and collision cross sections in C_2F_4
Abstract
We have measured the electron drift velocity, longitudinal diffusion coefficient, and ionization coefficient in tetrafluoroethene (C_2F_4). Using these data and the results of ab initio calculations of the elastic, momentum-transfer, and neutral-excitation cross sections, along with measurements of the partial ionization cross sections, we have performed a swarm analysis in order to construct a self-consistent set of electron impact cross sections for C_2F_4. The swarm analysis consists of solutions to Boltzmann's equation for electrons in C_2F_4 for values of E/N⩽500Td and direct Monte Carlo simulation of electron transport in C_2F_4 for 500Td⩽E/N⩽2000Td. We present an analysis and discussion of the sensitivity of cross sections derived from swarm data to uncertainties in the electron transport measurements. We also discuss the failure of the two-term spherical harmonic solution to Boltzmann's equation for E/N>500Td, which necessitated the use of Monte Carlo simulations for high values of E/N.
Additional Information
© 2002 American Institute of Physics. (Received 20 August 2001; accepted for publication 13 November 2001) The authors would like to thank Dr. Peter Ventzek of Motorola, Inc., for his interest in and encouragement of this work. Work at Caltech was supported by the Office of Basic Energy Sciences of the U.S. Department of Energy, by Sematech, Inc., and an equipment grant from Intel Corp.Attached Files
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Additional details
- Alternative title
- Electron transport properties and collision cross sections in C2F4
- Eprint ID
- 61685
- Resolver ID
- CaltechAUTHORS:20151028-114742602
- Department of Energy (DOE)
- Sematech, Inc.
- Intel
- Created
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2015-10-28Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field