Published August 15, 2001
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Electron cross section set for CHF_3
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Abstract
We describe the development of a consistent set of low-energy electron collision cross sections for trifluoromethane, CHF_3. First-principles calculations are used to obtain key elastic and inelastic cross sections. These are combined with literature values of the ionization cross section and with vibrational excitation cross sections obtained from the Born approximation to form a preliminary set, which is then adjusted to achieve consistency with measured swarm parameters.
Additional Information
© 2001 American Institute of Physics. (Received 2 February 2001; accepted for publication 7 May 2001) This research was supported by Sematech, Inc. Work at Caltech was also supported by the Office of Basic Energy Sciences of the Department of Energy and by an equipment grant from Intel Corp. Calculations reported here made use of the facilities of the Caltech Center for Advanced Computing Research and of the Jet Propulsion Laboratory's Supercomputing Project. The authors would like to thank Dr. Sadasivan Shankar of Intel Corp. for useful discussions and for his interest throughout the course of this work.Attached Files
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Additional details
- Alternative title
- Electron cross section set for CHF3
- Eprint ID
- 61607
- Resolver ID
- CaltechAUTHORS:20151027-154129341
- Sematech, Inc.
- Department of Energy (DOE)
- Intel
- Created
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2015-10-28Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field