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Published January 22, 2002 | Published
Journal Article Open

Low-energy electron collisions with tetrafluoroethene, C_2F_4

Abstract

We report calculated cross sections for elastic and inelastic collisions of low-energy electrons with tetrafluoroethene, C_2F_4. The elastic cross section shows a number of resonance features, which we classify according to symmetry and analyze in relation to available experimental data. Electron-impact excitation cross sections are obtained for the 1^3B_(1u)(T) and 1^1B_(1u)(V) states arising from the π→π* transition, as well as for eight other low-lying excited states arising from excitations out of the highest occupied molecular orbital. As expected, the T and V states make the largest individual contributions to electron-impact excitation at low energies; however, the other states are shown to contribute significantly to the total excitation cross section at impact energies from 10 to 25 eV.

Additional Information

© 2002 American Institute of Physics. (Received 16 April 2001; accepted 31 October 2001) This research was supported by Sematech, Inc., by the Office of Basic Energy Sciences of the Department of Energy, and by an equipment grant from Intel Corporation.

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August 19, 2023
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