Published August 1, 2002
| Published
Journal Article
Open
Electron collision cross sections for tetraethoxysilane
Abstract
We describe the development of a consistent set of low-energy electron-collision cross sections for tetraethoxysilane, also known as tetraethylorthosilicate. Ab initio calculations are used to obtain the elastic and momentum-transfer cross sections. These are combined with measured values of the ionization cross section and with model vibrational and electronic excitation cross sections to form a preliminary cross section set, which is then adjusted to achieve consistency with measured swarm parameters.
Additional Information
© 2002 American Institute of Physics. (Received 25 February 2002; accepted for publication 10 May 2002) This work was supported by SEMATECH, Inc. Work at the California Institute of Technology was also supported by the Department of Energy, Office of Basic Energy Sciences, and by an equipment grant from Intel Corp. Cross section calculations made use of the facilities of the Caltech Center for Advanced Computational Research, which is supported in part by the National Science Foundation.Attached Files
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Additional details
- Eprint ID
- 61599
- Resolver ID
- CaltechAUTHORS:20151027-154126740
- Sematech, Inc.
- Department of Energy (DOE)
- Intel
- NSF
- Created
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2015-10-28Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field