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Published June 2004 | public
Book Section - Chapter

Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors

Abstract

We demonstrate an addressable array (5-by-5) of high-quality microlenses applied to a Shack-Hartmann (SH) sensor in a microoptical system. Specific lenses in the array can be addressed using a new selection scheme (that we have designed, built, and tested) in which the mechanical resonant frequencies of individual lenssupport carriages are varied. Thus, by changing the frequency of the drive voltage, we require only two electrical connections per row in the lens system to identify the selected lens by its resonating focal image. We show that using this lensidentification method allows us to improve the dynamic range of Shack-Hartmann sensors by 2600-4600% over values attained in conventional SH designs.

Additional Information

© 2004 Transducers Research Foundation. The authors would like to thank Joseph Seeger for technical discussions on actuator design, Hanjun Kim of Hewlett Packard Lab (Palo Alto, CA) for helpful discussion on nitride-membrane fabrication, and Justin Black for wire-bonding. This project has been funded by the Berkeley Sensor & Actuator Center. Travel support has been generously provided by the Transducers Research Foundation and by the DARPA MEMS and DARPA BioFlips programs.

Additional details

Created:
August 19, 2023
Modified:
October 24, 2023