Reactor for producing large particles of materials from gases

Creators: Flagan, Richard C.; Alam, Mohammed K.

Abstract

A method and apparatus is disclosed for producing large particles of material from gas, or gases, containing the material (e.g., silicon from silane) in a free-space reactor comprised of a tube (20) and controlled furnace (25). A hot gas is introduced in the center of the reactant gas through a nozzle (23) to heat a quantity of the reactant gas, or gases, to produce a controlled concentration of seed particles (24) which are entrained in the flow of reactant gas, or gases. The temperature profile (FIG. 4) of the furnace is controlled for such a slow, controlled rate of reaction that virtually all of the material released condenses on seed particles and new particles are not nucleated in the furnace. A separate reactor comprised of a tube (33) and furnace (30) may be used to form a seed aerosol which, after passing through a cooling section (34) is introduced in the main reactor tube (34) which includes a mixer (36) to mix the seed aerosol in a controlled concentration with the reactant gas or gases.

Additional Information

Publication number US4,642,227. Publication type Grant. Application number 06/572,604. Publication date February 10, 1987. Filing date Jan 20, 1984. Priority date Aug 20, 1982. Government interests: The invention described herein was made in the performance of work under a NASA contract and is subject to the provisions of Section 305 of the National Aeronautics and Space Act of 1958, Public Law 85-568 (72 Stat. 435; 42 USC 2457). Parent case: This application is a continuation-in-part of application Ser. No. 06/409,941, filed Aug. 20, 1982, now abandoned.

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