Devices, Structures, and Processes for Optical MEMS

Abstract

New processes and devices in the area of optical microelectromechanical systems (MEMS) as researched in the Berkeley Sensor & Actuator Center (BASC) are described. A technique and fabrication procedure is presented to produce high-quality microlenses at selected locations in a micro-optical system. Polarization beam splitters are produced by another process, and their performance is measured and described. A new, much simplified process to fabricate vertically offset comb actuating structures is applied in the design of high-performance scanners, which are in turn used to control a laser ablation system. Very favorable performance comparisons are demonstrated between the researched system and a conventional commercial laser ablation system. A second system demonstration is a prototype Shack–Hartmann (SH) sensor, in which microlenses are mounted in carriages that can be individually addressed using the selectivity of their mechanically resonant mountings. This design is shown to increase markedly the dynamic range in wave aberration to which the SH sensor can be applied. A final application of optical MEMS design is to a reduced-size, enhanced-performance, phase shifting interferometer.

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