Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published August 2003 | Published
Book Section - Chapter Open

Micromachined Polarization Beam Splitters for the Visible Spectrum

Abstract

We have built and characterized batch-processed polarization beam splitters (PBS), important optical components to separate the orthogonal TE and TM components of light. The devices were fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes, and a triple-layer PBS produced extinction ratios of 21 and 16dB for reflected and transmitted light rays, respectively.

Additional Information

© 2003 IEEE.

Attached Files

Published - 01233520.pdf

Files

01233520.pdf
Files (362.9 kB)
Name Size Download all
md5:a2c5bdaf9ed8a40dd3d1a5d5c230daee
362.9 kB Preview Download

Additional details

Created:
August 19, 2023
Modified:
October 23, 2023