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Published 1986 | public
Journal Article

Controlled Nucleation Aerosol Reactors: Production of Bulk Silicon

Abstract

A new type of aerosol reactor is described. By controlling the rate of gas phase reactions such that vapor diffusion to existing particles is favored over homogeneous nucleation, a small number of seed particles can be grown to supermicron sizes. A model for the influence of growing particles on the rate of homogeneous nucleation has been used to design a reactor for the production of silicon particles by thermal decomposition of silane gas. Particles as large as 9 μm mass median diameter have been grown in this two-stage reactor. Silicon aerosol yields ranging from 70% to 83% have been achieved with this system.

Additional Information

© 1986 American Association for Aerosol Research. Received 3 June 1985; accepted 27 September 1985. This research was supported by the Department of Energy sponsored Flat Plate Solar Array Project at the Jet Propulsion Laboratory of the California Institute of Technology.

Additional details

Created:
August 19, 2023
Modified:
October 23, 2023