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Published May 22, 2015 | Published + Supplemental Material
Journal Article Open

Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

Abstract

Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of in-situ wafer-level fabrication of the high-performance micro/nano gas sensing chips by naturally integrating microhotplatform (MHP) with nanopore array (NPA). By introducing colloidal crystal template, a wafer-level ordered homogenous SnO_2 NPA is synthesized in-situ on a 4-inch MHP wafer, able to produce thousands of gas sensing units in one batch. The integration of micromachining process and nanofabrication process endues micro/nano gas sensing chips at low cost, high throughput, and with high sensitivity (down to ~20 ppb), fast response time (down to ~1 s), and low power consumption (down to ~30 mW). The proposed strategy of integrating MHP with NPA represents a versatile approach for in-situ wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.

Additional Information

© 2015 Macmillan Publishers Limited. This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ Received 22 October 2014; Accepted 15 April 2015; Published 22 May 2015. This work was supported in part by the National Basic Research Program of China (no. 2012CB934102), the National Science and Technology Supporting Program (no. 2012BAJ11B01), the Fund for Creative Research of National Natural Science Foundation of China (no. 61321492), the Key Project of National Natural Science Foundation of China (no. 91323304, and 91123037), the Project for Shanghai Outstanding Academic leaders (no. 15XD1504300), and by the project of NSFC for young scholars: (no. 61306143). Author Contributions: L.X. and Z.D. designed the study, performed experiments, and wrote the paper. T.L., and G.D. conceived the idea and designed the study. L.G., Y.W., H.Z. and Y.L. contributed to experimental setups. W.C., and Y.W. designed the study. All authors reviewed the manuscript.

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Created:
August 20, 2023
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October 23, 2023