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Published August 7, 2014 | Published
Book Section - Chapter Open

Realizing the diamond annular groove phase masks for the mid infrared region - five years of successful process development of diamond plasma etching

Abstract

The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 μm).

Additional Information

© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE). Date Published: 7 August 2014. The research leading to these results has received funding from the European Research Council under the European Union's Seventh Framework Programme (ERC Grant Agreement n.337569) and from the French Community of Belgium through an ARC grant for Concerted Research Actions. O.A. is a Research Associate of the F.R.S.-FNRS (Belgium).

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