Published August 7, 2014
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Realizing the diamond annular groove phase masks for the mid infrared region - five years of successful process development of diamond plasma etching
Chicago
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Abstract
The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 μm).
Additional Information
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE). Date Published: 7 August 2014. The research leading to these results has received funding from the European Research Council under the European Union's Seventh Framework Programme (ERC Grant Agreement n.337569) and from the French Community of Belgium through an ARC grant for Concerted Research Actions. O.A. is a Research Associate of the F.R.S.-FNRS (Belgium).Attached Files
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Additional details
- Eprint ID
- 57737
- Resolver ID
- CaltechAUTHORS:20150521-103828598
- European Research Council (ERC)
- 337569
- Communauté française de Belgique – Actions de recherche concertées
- Fonds de la Recherche Scientifique (FNRS)
- Created
-
2015-05-21Created from EPrint's datestamp field
- Updated
-
2021-11-10Created from EPrint's last_modified field
- Series Name
- Proceedings of SPIE
- Series Volume or Issue Number
- 9151