Published 1980 | public
Journal Article

Surface sticking probabilities for sputtered atoms of ^(93)Nb and ^(103)Rh

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Abstract

The sticking probabilities for sputtered atoms of ^(93)Nb and ^(103)Rh incident on Al_2O_3 surfaces have been measured using the backscattering of MeV heavy ions. In the circumstance where the collecting surface has become thickly covered, the sticking probabilities integrated over the energy distribution of sputtered atoms are 0.97 ± 0.01 and 0.95 ± 0.01 for ^(93)Nb and ^(103)Rh, respectively. In the limit of negligible areal coverage of the collector. the accuracy is less; in this case the sticking probabilities are 0.97^+_(0.08) and 0.95^(+0.05)_(0.08).

Additional Information

© 1980 Gordon and Breach Science Publishers, Inc. Received: 10 Sep 1979. Supported in part by the Department of Energy [EY-76-G-03-1305], the National Science Foundation [PHY76-83685]. and the National Aeronautics and Space Administration [NGR-05-002-333].

Additional details

Created:
August 19, 2023
Modified:
October 18, 2023