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Published October 1988 | public
Journal Article

Isotopic composition of boron secondary ions as a function of ion-beam fluence

Abstract

We have examined the effects of target mass on sputtered material using 100 keV argon and neon to sputter an elemental target comprising the two naturally occurring isotopes of boron. At low beam fluences (≈ 1 × 10^(15)ions/cm^2) a light-isotope secondary enhancement is observed relative to steady-state secondary ion yields collected at higher beam fluences. The enhancement (46.1%o for Ne^+ irradiation and 51.8%o for Ar^+ irradiation) is large compared to the predictions of analytical theories and is independent of variations in surface potential, chemical effects, and surface impurities. This effect is consistent with an explanation based on an energy and momentum asymmetry in the collision cascade.

Additional Information

© 1988 Published by Elsevier B.V. Received I February 1988 and in revised form 16 May 1988. Available online 16 October 2002. Work supported in part by USDOE Contract no. DE-AC02-76ER03074 and a Cottrell Research Grant from the Research Corporation. We would like to thank Prof. P.D. Parker and Prof. D.A. Bromley for their interest, stimulating conversations, and revision of this manuscript. Thanks are also due to T.F. Wang, K. Hubbard, M. Kaurin, and especially to Prof. R. Keddy for their interest and assistance. and to Alphonse Comeau for his patience and invaluable technical assistance.

Additional details

Created:
August 19, 2023
Modified:
October 18, 2023