Sputtering of Au, CsI and LiNbO_3 by multiply charged Ar ions
Abstract
We have bombarded targets of Csl, LiNbO_3 and Au with 48, 48 and 60 keV Ar^(q+) ions, respectively, for q = 4, 8 and 11. To look for any possible ejection mechanisms related to the primary charge state q of the projectile, we have examined the total (neutral plus ionic) differential angular sputtering yields and total integrated sputtering yields as a function of q. Our measurements were made using a collector technique: sputtered material was captured on foils surrounding the target, which were subsequently analyzed using heavy ion Rutherford backscattering spectroscopy to determine angular distributions; total sputtering yields were obtained from the angular distributions. No significant variation was observed in the yield from the Au target, but slight ( ~ 10%) enhancements in the total yields from the insulating targets were measured as the projectile charge state was increased from 4 + to 11 +.
Additional Information
© 1989 Published by Elsevier B.V. (North-Holland Physics Publishing Division). Received 3 January 1989 and in revised form 2 March 1989. We thank the support staff at the LBL 88-in Cyclotron for their assistance in preparing for this experiment, Dave Clark for designing the ion optics in the sputtering beamline, Claude Lyneis for help with equipment and ECR source tuning and operation, and Todd Jones for his assistance with the four-point probe measurements. Two of the authors. D.L. Weather and T.A. Tombrello, were supported in part by the National Science Foundation [DMR86-15641]; M.H. Prior and R.G. Stokstad were supported by the Director, Office of Energy Research, (Office of Basic Energy Sciences, Chemical Sciences Division [M.H. Prior]), (Division of Nuclear Physics of the Office of High Energy and Nuclear Physics [R.G. Stokstad]), US Department of Energy, under Contract No. DE-AC03-76SF00098; R.E. Tribble was supported in part by the Department of Energy under Grant No. DE-FG05-86ER40256 and the Robert A. Welch Foundation.Additional details
- Alternative title
- Sputtering of Au, CsI and LiNbO3 by multiply charged Ar ions
- Eprint ID
- 51164
- DOI
- 10.1016/0168-583X(89)90440-0
- Resolver ID
- CaltechAUTHORS:20141103-094551937
- DMR86-15641
- NSF
- DE-AC03-76SF00098
- Department of Energy (DOE)
- DE-FG05-86ER40256
- Department of Energy (DOE)
- Robert A. Welch Foundation
- Created
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2014-11-03Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field