Published April 29, 1985
| public
Journal Article
Electronic-excitation mechanism in sputtering induced by high density electronic excitation
Chicago
Abstract
On the basis of the assumption that two holes are attractive in a dense electron-hole plasma near the surface because of the Anderson negative-U interaction, the yield of laser- and ion-induced sputtering in the electronic excitation regime was calculated as a function of electron-hole concentration in a plasma. It is found that the model gives an order-of-magnitude account of the yields of these two sputtering processes.
Additional Information
© 1985 Elsevier Science Publishers B.V. Received 10 December 1984; revised manuscript received 13 February 1985; accepted for publication 13 February 1985. Available online 10 September 2002. Supported in part by the Grant-in-Aid for Scientific Research of the Ministry of Education, Science and Culture and the National Science Foundation [DMR83-18274] and Schlumberger-Doll Research.Additional details
- Eprint ID
- 51141
- DOI
- 10.1016/0375-9601(85)90045-3
- Resolver ID
- CaltechAUTHORS:20141031-151119774
- Grant-in-Aid for Scientific Research of the Ministry of Education, Science and Culture
- NSF
- DMR83-18274
- Schlumberger-Doll Research
- Created
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2014-10-31Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field