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Published May 2, 1993 | public
Journal Article

A molecular dynamics simulation of collisional excitation mechanisms in Al

Abstract

A modified version of the SPUT2 molecular dynamics sputtering code was used to reinvestigate core excitation in Al atoms following bombardment with 1–5 keV Ar+ ions. For all bombarding energies, asymmetric collisions between the incoming ion and target atoms yielded smaller minimum distances-of-closest-approach between the collision partners for hard collisions than did symmetric collisions between pairs of target atoms. Simple critical distance-of-closest-approach models were used to estimate core excitation for both asymmetric and symmetric collisions. A single value of Rc (0.367 Å) was used for asymmetric Ar-Al collisions, while two choices of Rc were used for symmetric Al-Al collisions (0.442 and 0.530 Å). With the smaller Rc value for Al-Al collisions, we find that core excitation proceeds predominantly by asymmetric collisions at all bombarding energies above threshold. At 5 keV bombarding energy the percentage of sputtered, core-excited atoms originating from asymmetric collisions ranged from 89 to 95% depending on the incident direction of the projectile. With the larger Rc value, core excitation proceeds predominantly by asymmetric collisions at bombarding energies above approximately 3 keV; and at 5 keV asymmetric collisions accounted for ∼ 60 to ∼ 84% of sputtered, core-excited atoms. Lifetime corrections and corrections for Auger neutralization near the target surface had little effect on the ratio of asymmetric to symmetric collisions responsible for atomic-like Auger emission. These simulation results suggest that simultaneous multiple collisions are very important in the initial energy- and momentum-transfer stage which initiates the cascade.

Additional Information

© 1993 Elsevier Science Publisher B.V. Received 14 February 1992 and in revised form 14 December 1992. The authors thank Dr. Edward S. Parilis for helpful comments regarding vacancy transfers.

Additional details

Created:
August 20, 2023
Modified:
October 18, 2023