Micro/Nano Patterened Integrated Electrochemical Sensors for Implantable Applications

Abstract

Electrochemical sensors are important candidates for autonomous integrated sensing applications. Such sensors can provide accurate and long-term measurements of multiple analyte for applications in complex environments e.g. in body fluids. As such sensors are made smaller and need to be fully integrated, special approaches need to be taken in order to achieve functional sensitivity, stability, and longevity. Here, we provide details of CMOS compatible, integrated design and fabrication of these sensors on very small scales using micro/nano scale fabrication and surface modification techniques. We also present in situ functionalization and novel interface design techniques. We also provide a comparison between integrated reference electrodes fabricated using CMOS compatible fabrication techniques. Finally, we show examples of sensing Glucose and DNA concentration in biological samples.

Additional details