A micromechanical model of surface steps

Abstract

The surface of an epitaxial thin film typically consists of terraces separated by steps of atomic height and it evolves largely by the motion of steps. Steps are sources of stress that interact with other residual stress fields, and these interactions have a profound effect on surface evolution. A model of the elastic field arising from a two-dimensional step is presented as a departure from the commonly used half-plane point-multipole model. The field is calculated asymptotically for small step height up to second order in terms of 'structural' parameters that can be determined from empirical data or atomistic calculations. Effects of a lattice mismatch and surface stress are included. The model is shown to be in remarkable agreement with atomistic predictions. It is demonstrated that second-order terms are necessary for understanding non-trivial step–step interactions, and that these second-order fields cannot be described by point sources on a half-plane.

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