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Published July 2, 1999 | Published
Journal Article Open

Microfabrication inside capillaries using multiphase laminar flow patterning

Abstract

The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.

Additional Information

© 1999 American Association for the Advancement of Science. Received for publication 9 February 1999. Accepted for publication 15 April 1999. This work was financially supported by the Defense Advanced Research Projects Agency and NSF grant ECS-9729405. Materials Research Science and Engineering Center–shared facilities supported by the NSF under grant DMR-9400396 were used. P.J.A.K. acknowledges the Netherlands Organization for Scientific Research (NWO) for a postdoctoral fellowship. We acknowledge W. Huck and Y. Lu for their help with the atomic force microscopy and scanning electron microscopy experiments.

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