Effects of deposition temperature on Parylene-C properties
Abstract
This paper reports the study of in-situ deposition temperature (ranging from 20°C to 80°C) effects on Parylene-C properties in terms of glass transition temperature (T_g), β-relaxation temperature (T_β), Young's modulus and crystallinity (including crystallite size). The results show that the Parylene-C (PA-C) thin film deposited at higher deposition temperature exhibits higher T_g and T_β, revealing that the movement of the molecular backbones is further frozen and restricted. It is physically consistent with the data showing that higher deposition temperature induces greater degree of crystallinity and larger Young's modulus. With the new knowledge, Parylene-C thin film with properties tailored to various requirements could be achieved by choosing the proper deposition temperature.
Additional Information
© 2013 IEEE. The authors would like to thank all the colleagues working in the Caltech Micromaching Laboratory for their generous help in the sample preparation and discussion of the experiments.Additional details
- Eprint ID
- 39616
- DOI
- 10.1109/MEMSYS.2013.6474260
- Resolver ID
- CaltechAUTHORS:20130729-090934013
- Created
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2013-07-29Created from EPrint's datestamp field
- Updated
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2021-11-09Created from EPrint's last_modified field
- Other Numbering System Name
- INSPEC Accession Number
- Other Numbering System Identifier
- 13369904