Published September 2012
| public
Book Section - Chapter
Chemically-Etched Ultra-High-Q Micro-Cavities on a Silicon Chip
- Creators
- Chen, Tong
-
Lee, Hansuek
- Li, Jiang
-
Vahala, Kerry
Abstract
Optical resonators with quality factor as high as 875 million are demonstrated. These silicon-chip-based devices are fabricated using only lithography and chemical etching, thereby expanding integration opportunities and possible applications.
Additional Information
© 2012 IEEE. This work was supported by DARPA.Additional details
- Eprint ID
- 37409
- DOI
- 10.1109/IPCon.2012.6358592
- Resolver ID
- CaltechAUTHORS:20130308-094240934
- Defense Advanced Research Projects Agency (DARPA)
- Created
-
2013-03-29Created from EPrint's datestamp field
- Updated
-
2022-04-13Created from EPrint's last_modified field
- Other Numbering System Name
- INSPEC Accession Number
- Other Numbering System Identifier
- 13149934