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Published January 2012 | public
Book Section - Chapter

Cantilever actuated by piezoelectric Parylene-C

Abstract

We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.

Additional Information

© 2012 IEEE. Date of Current Version: 15 March 2012.

Additional details

Created:
August 19, 2023
Modified:
October 23, 2023