Published January 2012
| public
Book Section - Chapter
Cantilever actuated by piezoelectric Parylene-C
Chicago
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Abstract
We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.
Additional Information
© 2012 IEEE. Date of Current Version: 15 March 2012.Additional details
- Eprint ID
- 36738
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- CaltechAUTHORS:20130201-102857337
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2013-02-08Created from EPrint's datestamp field
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2021-11-09Created from EPrint's last_modified field
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- 12618207