Published October 1975
| Published
Journal Article
Open
Secondary fluorescent excitation in the scanning electron microscope: Improved sensitivity of energy dispersive analysis
- Creators
- Gould, R. W.
- Healey, J. T.
Chicago
An error occurred while generating the citation.
Abstract
The use of secondary fluorescence for x‐ray energy spectroscopy in the scanning electron microscope has greatly enhanced both resolution and the lower limit of detection. This note describes a simple secondary fluorescence system. The x‐ray energy spectra taken from a stainless steel sample illustrate the advantages of this method.
Additional Information
© 1975 American Institute of Physics. Received 27 June 1975. Online Publication Date: 2 September 2008.Attached Files
Published - GOUrsi75.pdf
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GOUrsi75.pdf
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Additional details
- Eprint ID
- 33189
- Resolver ID
- CaltechAUTHORS:20120814-152848159
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2012-08-14Created from EPrint's datestamp field
- Updated
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2023-05-19Created from EPrint's last_modified field