Published May 1979
| Published
Journal Article
Open
Diagnostic test for ion implantation dosimetry
- Creators
- Matteson, S.
- Tonn, D. G.
- Nicolet, M-A.
Chicago
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Abstract
A diagnostic technique is discussed and illustrated by experiment, which reveals sources of error in current integration dosimetry. The technique uses simple, specially prepared samples and an oscilloscope display of the measured current versus time.
Additional Information
© 1979 American Vacuum Society. Received 8 February 1979; accepted 27 March 1979. The authors gratefully acknowledge the support of R. Gorris and J. Mallory for the preparation of the diagnostic samples. This research was supported in part by the U.S. Army Research Office under the Joint Services Electronic Program (DAAG-29-77-C-0015)Attached Files
Published - MATjvst79.pdf
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Additional details
- Eprint ID
- 32745
- Resolver ID
- CaltechAUTHORS:20120726-110219420
- Army Research Office (ARO) Joint Services Electronic Program
- DAAG-29-77-C-0015
- Created
-
2012-07-30Created from EPrint's datestamp field
- Updated
-
2021-11-09Created from EPrint's last_modified field