Published December 1989
| Published
Journal Article
Open
Quantitative measurement of the composition of Al_xGa_(1−x)As heterostructures using a simple backscattered electron detector
Abstract
We describe a technique for the quantitative measurement of composition in Al_xGa_(1−x)As heterostructures using a simple solid‐state backscattered electron detector in a scanning electron microscope. Calibration data are presented and are shown to be consistent with the Castaing [Adv. Electron. Electron Phys. 13, 317 (1960)] theory. The technique is applied to image representative Al_xGa_(1−x)As heterostructures including a graded index separate confinement heterostructure (GRINSCH) laser structure.
Additional Information
© 1989 American Institute of Physics. Received 19 June 1989; accepted for publication 31 August 1989. The authors would like to thank Lars Eng for supplying MBE material and growth calibration data. This work was supported by the Office of Naval Research and SDIO-ISTC. P.C.S. would like to acknowledge support under a NSF Graduate Fellowship.Attached Files
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Additional details
- Eprint ID
- 31524
- Resolver ID
- CaltechAUTHORS:20120517-095740025
- Office of Naval Research (ONR)
- SDIO-ISTC
- NSF Graduate Fellowship
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2012-05-22Created from EPrint's datestamp field
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2021-11-09Created from EPrint's last_modified field