Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications
Abstract
We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.
Additional Information
© 2012 American Chemical Society. Received: October 24, 2011. Revised: January 3, 2012. Publication Date (Web): January 26, 2012. The authors thank R. Karabalin for help with optical measurements. We gratefully acknowledge support from the Defense Advanced Research Projects Agency via DARPA/MTO-MGA Grant NBCH1050001, as well as support from the Institut Carnot via the Carnot-NEMS project.Attached Files
Accepted Version - nihms-522382.pdf
Supplemental Material - nl2037479_si_001.pdf
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Additional details
- PMCID
- PMC3839335
- Eprint ID
- 31331
- Resolver ID
- CaltechAUTHORS:20120507-113502115
- Defense Advanced Research Projects Agency (DARPA)
- NBCH1050001
- Institut Carnot
- Created
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2012-05-08Created from EPrint's datestamp field
- Updated
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2021-11-09Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute