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Published March 2012 | Supplemental Material + Accepted Version
Journal Article Open

Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

Abstract

We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare simulant within only a 2 s exposure period.

Additional Information

© 2012 American Chemical Society. Received: October 24, 2011. Revised: January 3, 2012. Publication Date (Web): January 26, 2012. The authors thank R. Karabalin for help with optical measurements. We gratefully acknowledge support from the Defense Advanced Research Projects Agency via DARPA/MTO-MGA Grant NBCH1050001, as well as support from the Institut Carnot via the Carnot-NEMS project.

Attached Files

Accepted Version - nihms-522382.pdf

Supplemental Material - nl2037479_si_001.pdf

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