Published November 1995
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Fluidic shear-stress measurement using surface-micromachined sensors
Chicago
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Abstract
A poly-silicon hot-film shear-stress sensor insulated by a vacuum-chamber underneath has been designed and fabricated by the surface micromachining technology. The sensor is operated at both constant current and constant temperature modes. The dynamic performance (including time constant and cut-off frequency) measurement, calibration, and temperature compensation of the sensor have been realized.
Additional Information
© 1995 IEEE. Date of Current Version: 06 August 2002. This work is supported by AFOSR URI project (University Research Initiative).Attached Files
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Additional details
- Eprint ID
- 29348
- Resolver ID
- CaltechAUTHORS:20120217-075451649
- Air Force Office of Scientific Research (AFOSR)
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2012-02-17Created from EPrint's datestamp field
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2021-11-09Created from EPrint's last_modified field