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Published February 1998 | public
Book Section - Chapter

Fractal capacitors

Abstract

This paper introduces a high-density linear capacitor structure with low bottom-plate parasitics. The density of such a structure improves as process technologies scale. Fractal capacitors retain the linearity of metal-to-metal capacitors with limited degradation of Q. The structures automatically limit the length of the thin metal sections to a few microns, keeping the series resistance reasonably small. Another advantage is the reduction of bottom-plate capacitance because of the smaller area.

Additional Information

© 1998 IEEE. Date of Current Version: 06 August 2002. The authors acknowledge T. Ahrens for helpful discussions.

Additional details

Created:
August 19, 2023
Modified:
October 24, 2023