Published June 1998
| public
Journal Article
Surface-micromachined Ta-Si-N beams for use in micromechanics
Chicago
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Abstract
Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.
Additional Information
© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997.Additional details
- Eprint ID
- 28563
- DOI
- 10.1088/0960-1317/8/2/011
- Resolver ID
- CaltechAUTHORS:20111222-090724822
- Created
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2011-12-22Created from EPrint's datestamp field
- Updated
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2022-07-12Created from EPrint's last_modified field