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Published June 1998 | public
Journal Article

Surface-micromachined Ta-Si-N beams for use in micromechanics

Abstract

Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.

Additional Information

© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997.

Additional details

Created:
August 22, 2023
Modified:
October 24, 2023