Published June 27, 2011
| public
Journal Article
Growth of Compositionally Graded BST by Metal Organic Chemical Vapor Deposition
- Creators
- Boyd, D. A.
- Cole, M. W.
Abstract
We report the growth of a compositionally stratified Ba_xSr1_(-x)TiO_3 (BST) thin film on MgO by metal organic chemical vapor deposition (MOCVD). Real-time control of the precursor flux based on UV absorption spectroscopy was used to systematically vary the ratio of Ba:Sr during deposition. The composition of the film with depth was measured by Rutherford backscattering spectroscopy, and x was found to decrease from 0.87 at the film-air interface to 0.43 near the film-MgO interface.
Additional Information
© 2011 Taylor & Francis Group, LLC. Received January 3, 2011. Available online June 27, 2011. This work has been generously supported by the Army Research Office award # W911NF-07-1-0359.Additional details
- Eprint ID
- 28419
- Resolver ID
- CaltechAUTHORS:20111212-104658135
- W911NF-07-1-0359
- Army Research Office (ARO)
- Created
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2011-12-12Created from EPrint's datestamp field
- Updated
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2021-11-09Created from EPrint's last_modified field