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Published October 2006 | Published
Book Section - Chapter Open

Microfabricated Platform for Nanoscale Flow Sensing and Control

Abstract

In this paper we describe a microfabricated platform for nanoscale flow sensing and control. Two custom-built pneumatically-driven pumps were used to deliver two different fluids into our microfluidic chip. The two liquids were mixed on-chip and the flow rate and composition of the resulting liquid was measured. Flow rate measurements were accurate within a few nL/min and the composition within 0.2%. In this paper, composition is defined as the makeup (by volume and expressed as a percentage) of a binary mixture. Feedback from the sensors was used to control the pumps in order to produce the desired flow profiles.

Additional Information

© 2006 IEEE. Issue Date: 22-25 Oct. 2006. Date of Current Version: 07 May 2007. This research was funded in part by the National Institutes of Health.

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Published - Shih2006p92262006_Ieee_Sensors_Vols_1-3.pdf

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