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Published May 2010 | public
Journal Article

Wiring Nanoscale Biosensors with Piezoelectric Nanomechanical Resonators

Abstract

Nanoscale integrated circuits and sensors will require methods for unobtrusive interconnection with the macroscopic world to fully realize their potential. We report on a nanoelectromechanical system that may present a solution to the wiring problem by enabling information from multisite sensors to be multiplexed onto a single output line. The basis for this method is a mechanical Fourier transform mediated by piezoelectrically coupled nanoscale resonators. Our technique allows sensitive, linear, and real-time measurement of electrical potentials from conceivably any voltage-sensitive device. With this method, we demonstrate the direct transduction of neuronal action potentials from an extracellular microelectrode. This approach to wiring nanoscale devices could lead to minimally invasive implantable sensors with thousands of channels for in vivo neuronal recording, medical diagnostics, and electrochemical sensing.

Additional Information

© 2010 American Chemical Society. Published In Issue: May 12, 2010; Article ASAP: April 09, 2010; Received: January 22, 2010; Revised: March 19, 2010. We thank I. De Vlaminck, W. van de Graaf, S. Degroote, and G. Borghs for the epitaxial GaAs substrates, G. Laurent for assistance with locust preparations and discussions, R. R. Harrison for the extracellular electronic amplifiers, M. R. Freeman for support with optical interferometry, and H. A. Lester for discussions. Device fabrication was carried out at the Kavli Nanoscience Institute, Caltech, and the NNIN Nanofabrication facility, UC Santa Barbara. This work was supported by the Broad Foundation under the Broad Fellowship Program in Brain Circuitry.

Additional details

Created:
September 14, 2023
Modified:
October 23, 2023