Tiny Tale Gets Grand

Dietrich, Jane S. (1986) Tiny Tale Gets Grand. Engineering and Science, 49 (3). pp. 24-26. ISSN 0013-7812 https://resolver.caltech.edu/CaltechES:49.3.Tale

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Abstract

Electron beam lithography reduces a page of Dickens to micrometer size to meet a longstanding challenge from Richard Feynman.


Item Type:Article
Uncontrolled Keywords:Electrical engineering
Record Number:CaltechES:49.3.Tale
Persistent URL:https://resolver.caltech.edu/CaltechES:49.3.Tale
Parent URL:http://resolver.caltech.edu/CaltechES:49.3.0
Usage Policy:You are granted permission for individual, educational, research and non-commercial reproduction, distribution, display and performance of this work in any format.
Item Category:All Records > Feature Articles
ID Code:3479
Deposited By:INVALID USER
Deposited On:26 Dec 2012 05:26
Last Modified:15 May 2023 18:52

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