Published August 28, 2002
| Submitted
Report
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The Design and Implementation of a Reticle Maker for VLSI
- Creators
- Gray, Moshe
Abstract
This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.
Attached Files
Submitted - TR_4299.pdf
Files
TR_4299.pdf
Files
(3.0 MB)
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Additional details
- Eprint ID
- 27028
- Resolver ID
- CaltechCSTR:1981.4299-tr-81
- Created
-
2002-08-28Created from EPrint's datestamp field
- Updated
-
2019-10-03Created from EPrint's last_modified field
- Caltech groups
- Computer Science Technical Reports
- Series Name
- Computer Science Technical Reports
- Series Volume or Issue Number
- 1981.4299