Published July 14, 1986
| Published
Journal Article
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Submicron silicon powder production in an aerosol reactor
Abstract
Powder synthesis by thermally induced vapor phase reactions is described. The powder generated by this technique consists of spherical, nonagglomerated particles of high purity. The particles are uniform in size, in the 0.1–0.2 µm size range. Most of the particles are crystalline spheres. A small fraction of the spheres are amorphous. Chain agglomerates account for less than 1% of the spherules.
Additional Information
© 1986 American Institute of Physics (Received 24 February 1986; accepted 19 May 1986) This work was supported in part by the Flat Plate Solar Array Project, Jet Propulsion Laboratory, California Institute of Technology sponsored by the U.S. Department of Energy through an agreement with NASA.Attached Files
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- Eprint ID
- 4719
- Resolver ID
- CaltechAUTHORS:WUJapl86
- NASA/JPL/Caltech
- Department of Energy (DOE)
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2006-09-05Created from EPrint's datestamp field
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2023-04-18Created from EPrint's last_modified field