Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published August 16, 2004 | public
Journal Article Open

Macroporous silicon membranes as electron and x-ray transmissive windows

Abstract

Macroporous silicon membranes are fabricated whose pores are terminated with 60 nm thin silicon dioxide shells. The transmission of electrons with energies of 5 kV-25 kV through these membranes was investigated reaching a maximum of 22% for 25 kV. Furthermore, the transmission of electromagnetic radiation ranging from the far-infrared to the x-ray region was determined. The results suggest the application of the membrane as window material for electron optics and energy dispersive x-ray detectors.

Additional Information

Copyright © 2004 American Institute of Physics. Received 9 February 2004; accepted 21 May 2004.

Files

SCHapl04.pdf
Files (271.9 kB)
Name Size Download all
md5:a17d37f8b03114e5423c3b00374cee58
271.9 kB Preview Download

Additional details

Created:
August 22, 2023
Modified:
March 5, 2024