Published April 16, 2007
| Published
Journal Article
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An optical fiber-taper probe for wafer-scale microphotonic device characterization
Abstract
A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the "dimpled" taper controls the probe-sample interaction length and the level of noise present during coupling measurements. Practical demonstrations with high-Q silicon microcavities include testing a dense array of undercut microdisks (maximum Q = 3.3×10^6) and a planar microring (Q = 4.8×10^6).
Additional Information
© 2007 Optical Society of America Received 9 Feb 2007; revised 15 Mar 2007; accepted 19 Mar 2007; published 4 Apr 2007 We thank M. D. Henry, K. Srinivasan, and K. Hennessy for fabrication assistance and M. Hochberg and A. Scherer for the SOI wafer used to fabricate the planar microring sample. This work was supported by the DARPA EPIC program, contract number HR0011-04-1-0054. For graduate fellowship support, we thank the Moore Foundation (CPM and MB), NSF (CPM), NPSC (MB), and HRL Laboratories (MB).Attached Files
Published - MICoe07.pdf
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MICoe07.pdf
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Additional details
- Eprint ID
- 8160
- Resolver ID
- CaltechAUTHORS:MICoe07
- HR0011-04-1-0054
- Defense Advanced Research Projects Agency (DARPA)
- Gordon and Betty Moore Foundation
- NSF
- National Physical Science Consortium
- Hughes Research Laboratories
- Created
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2007-07-31Created from EPrint's datestamp field
- Updated
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2019-10-02Created from EPrint's last_modified field